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Products

High Quality Carbon Tetrafluoride

Quality Standard

Molecular FormulaCF4               Molecular Weight88.005

Item

Index

Carbon Tetrafluoride (CF4)

99.999

Oxygen(O2)  ppmv

1

Nitrogen(N2)   ppmv

4

Moisture(H2O)     ppmv

1

Carbon Dioxide(CO2)    ppmv

1

Carbon Monoxide(CO)  ppmv

0.3

Acidity Express(as HF) ppm/m

0.1

Fluorocarbon   ppmv

1

Sulphur hexafluoride(SF6)  ppmv

1

Impurities   ppmv

10

Properties
Carbon Tetrafluoride is colorless,odorless,non-combustible and high compressibility gas in normal conditions;high volatility;most stable organic compound;insolubility in water.
Application
Carbon Tetrafluoride is one of the largest comsumption kinds of plasma etching gases in microelectronics industry at present,also widely used in surface cleaning of electronic device,production of solar cell,aser technology,gas phase insulation,subzero refrigeration,leakage inspection agent and detergent inprinted circuit production.
Storage
In cool,and ventilated storehouse. Temperature should not be higher than 30℃ in storehouse. Keep from fire and heat. Avoid direct sunlight. It should be kept away from inflammable materials.
Transport
Level one inorganic sour corrosion substance.
Packing
It is filled in seamless steel cylinder and aluminium alloy container. It is normally filled in 47L,40L,10L,8L seamless steel cylinder. The pressure is 12.5MPa. Also can be filled on consumers’ requests.

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