Yongjing framework：Fujian Shaowu Yongjing Chemical Co., Ltd.
Add: 18#, Xin'An Road, Shaowu City, Fujian, China
International Trade Dept.
Tel: +86-599-6655932/6654968
Fax: +86-599-6654591
Home Trade Dept.
Tel: +86-599-6654866/6654968
Fax: +86-599-6655755
High-purity Chemicals Dept.
Tel: +86-599-6655536/6654968
Fax: +86-599-6655755
Quality Standard：
| Molecular Formula：CF4 Molecular Weight：88.005 | |
|
Item |
Index |
|
Carbon Tetrafluoride (CF4) |
99.999 |
|
Oxygen(O2) ppmv |
1 |
|
Nitrogen(N2) ppmv |
4 |
|
Moisture(H2O) ppmv |
1 |
|
Carbon Dioxide(CO2) ppmv |
1 |
|
Carbon Monoxide(CO) ppmv |
0.3 |
|
Acidity Express（as HF） ppm/m |
0.1 |
|
Fluorocarbon ppmv |
1 |
|
Sulphur hexafluoride(SF6) ppmv |
1 |
|
Impurities ppmv |
10 |
Properties：
Carbon Tetrafluoride is colorless，odorless，non-combustible and high compressibility gas in normal conditions；high volatility；most stable organic compound；insolubility in water.
Application：
Carbon Tetrafluoride is one of the largest comsumption kinds of plasma etching gases in microelectronics industry at present，also widely used in surface cleaning of electronic device，production of solar cell，aser technology，gas phase insulation，subzero refrigeration，leakage inspection agent and detergent inprinted circuit production.
Storage：
In cool，and ventilated storehouse. Temperature should not be higher than 30℃ in storehouse. Keep from fire and heat. Avoid direct sunlight. It should be kept away from inflammable materials.
Transport：
Level one inorganic sour corrosion substance.
Packing：
It is filled in seamless steel cylinder and aluminium alloy container. It is normally filled in 47L，40L，10L，8L seamless steel cylinder. The pressure is 12.5MPa. Also can be filled on consumers’ requests.
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